Ellipsometer manual

The SE consists of a control rack and a ellipsometer desktop. The light source (Xe arc lamp) is located in the control rack. Also included are the documentation of the devices, the installation software and other accessoires like spare parts and mounting aids. Ellipsometer. Fig. 1: (a) Close-up Gaertner manual Null-ellipsometer (b) Schematic Diagram. 4. Repeat 2 and 3 to minimize the meter reading. If it falls below 25, use the gain control to bring the meter indicator reading up to 5. If the meter reading can . A Operating Your FOCUS Ellipsometer System iii 5/01/97 This manual contains information proprietary to Rudolph Technologies, Inc. Revision History This page provides a revision history for this manual. Pages Affected Revision Change Date Reason All 5/01/97 Original release covering FE III, IV, VII, SMIF, and DSeries.

The Ellipsometer measures by reflecting a polarized ÅHeNe Class II laser beam from the sample surface, 6 inches (mm) or less, at one of eight available incident angles and determines the change in polarization caused by the sample virtually instantaneously via the Stokes Meter. The Stokes Meter. In-Line ellipsometer measuring a fi lm through a glass panel. Close-up of an In-Line ellipsometer integrated within a conveyor system. A microcrystalline silicon fi lm was mapped at hundreds of points across a x meter panel. User defi ned routines acquire data over full panel (Figure 1). Full spectra are ana-. The Rudolph Ellipsometer is a version of the AutoEL II Automatic Ellipsometer (Model A). It is capable of performing ellipsometric measurements at three wavelengths: , , and nm. An external PC with the customized DAFIBM software converts the measured Δ and values into Φ thickness and refractive index.

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